REFLECTOMETRY STUDY OF NANOPOROUS FILMS WITH ARRAYS OF GOLD NANOPARTICLES

The influence of conditions occurring at the pulsed laser deposition of films with gold nanoparticles on the film porosity has been studied, by using the X-ray reflectometry. The films of two types were obtained by depositing particles (i) from the direct high-energy flow of erosion-torch particles and (ii) from the backward low-energy one. In both cases, the films were deposited either at the residual air pressure p=10(-2) Pa or in the argon atmosphere with the pressures p(Ar) = 5-100 Pa. In case (i), the film porosity was 0.1% at p=10(-2) Pa and 1%at p(Ar) = 5 Pa. The plasmon properties of those films are associated with the propagation of surface plasmon-polariton waves. As the argon pressure grew further up to 100 Pa, the porosity increased to approximately 30%. In case (ii), the porosity of films deposited at p(Ar) = 5-100 Pa onto substrates located in the target plane equaled 30 to 70% and depended on the distance from the film to the torch axis. All films with the porosity higher than 20% turned out nanocomposite structures with arrays of gold nanoparticles, which enabled us to observe the excitation of local surface plasmons.