AN ANALYSIS OF LTE EFFECTS IN INDUCTIVELY COUPLED RF PLASMAS

被引：27
|
作者：
GRAVELLE, DV [1 ]
BEAULIEU, M [1 ]
BOULOS, MI [1 ]
GLEIZES, A [1 ]
机构：
[1] UNIV TOULOUSE 3,CTR PHYS ATOM,CNRS,UA 277,F-31062 TOULOUSE,FRANCE
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1989年 / 22卷 / 10期
关键词：
D O I：
10.1088/0022-3727/22/10/009
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1471 / 1477
页数：7
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