SELECTIVITY AND ENHANCEMENT OF COPPER CVD - IMPORTANCE OF GAS-PHASE AND SURFACE-REACTIONS

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作者：
DUBOIS, LH [1 ]
CHIANG, CM [1 ]
ZEGARSKI, BR [1 ]
机构：
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1993年 / 205卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：295 / COLL
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