共 50 条
- [21] Development of RF linac for high-current applications NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 139 (1-4): : 394 - 400
- [24] A HIGH-CURRENT MULTICHANNEL (MEQALAC) SYSTEM FOR ION-IMPLANTATION NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 24-5 : 787 - 790
- [25] HIGH-CURRENT ION-IMPLANTATION BY PLASMA IMMERSION TECHNIQUE NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4): : 569 - 572
- [26] HIGH-CURRENT DENSITY, BROAD BEAM ION-IMPLANTATION MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 116 : 215 - 220
- [27] CONTROL TECHNIQUES FOR A HIGH-CURRENT ION-IMPLANTATION SYSTEM NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01): : 183 - 186
- [28] VERSATILE HIGH-CURRENT METAL-ION IMPLANTATION FACILITY SURFACE & COATINGS TECHNOLOGY, 1992, 51 (1-3): : 529 - 533
- [30] High-dose ion implantation using a high-current plasma lens SURFACE & COATINGS TECHNOLOGY, 2000, 128 (128): : 15 - 20