共 50 条
- [2] HIGH-CURRENT IMPLANTATION EQUIPMENT NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 456 - 459
- [4] A TECHNIQUE FOR OPTIMIZING THE DOSE UNIFORMITY OF A MAGNETIC SCANNING HIGH-CURRENT IMPLANTER NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2): : 228 - 236
- [5] HIGH-CURRENT IMPLANTATION SYSTEMS FOR CMOS PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 530 : 42 - 49
- [6] HIGH-CURRENT PELLETRON FOR ION-IMPLANTATION NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 515 - 517
- [7] A HIGH-CURRENT ION IMPLANTER WITH HYBRID SCANNING NUCLEAR INSTRUMENTS & METHODS, 1980, 171 (02): : 245 - 250
- [9] HIGH-CURRENT AND HIGH-DOSE PHOSPHORUS IMPLANTATION IN SILICON RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 48 (1-4): : 109 - 114
- [10] HIGH-CURRENT ION SOURCES FOR ION-IMPLANTATION NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 518 - 521