USE OF LOW-ENERGY ACCELERATORS FOR ION IMPLANTATION

被引：9
|
作者：
CRACKNELL, PJ
GETTINGS, M
STEPHENS, KG
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1971年 / 92卷 / 04期
关键词：
D O I：
10.1016/0029-554X(71)90097-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：465 / +
页数：1
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