SI(111)(7X7) DANGLING BOND CONTRIBUTION TO SURFACE RECOMBINATION

被引:4
|
作者
HSU, JWP
BAHR, CC
FELDE, AV
DOWNEY, SW
HIGASHI, GS
CARDILLO, MJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.577891
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We correlate photoconductivity with surface characterization in order to probe the influence of surface properties of Si(111) on carrier dynamics. Results on the clean (7 X 7) reconstructed surface indicate that carrier recombination at this surface is fast, with a surface recombination velocity measured to be greater-than-or-equal-to 2 X 10(6) cm/s. This is consistent with the notion of midgap dangling bond states acting as effective recombination centers. Combining our results and the present understanding of the (7 X 7) electronic structure, we estimate the carrier capture cross section for dangling bonds to be approximately 10(-15) cm2. We also investigate the effect of processing and find that carrier dynamics is strongly influenced by trace impurities below the detection limit of conventional surface characterization techniques.
引用
收藏
页码:985 / 989
页数:5
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