ELLIPSOMETRIC STUDIES ON HIGH-ABSORBING FILMS ON SILICON SURFACE

被引：0
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作者：
BELINSKA, AA
KALNYNYA, RP
FELTYN, IA
机构：
来源：
OPTIKA I SPEKTROSKOPIYA | 1979年 / 46卷 / 02期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：317 / 320
页数：4
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