Optical properties of diamond-like carbon films subjected to ultraviolet irradiation

被引:0
|
作者
Klyui, N. I. [1 ]
Litovchenko, V. G. [1 ]
Lukyanov, A. N. [1 ]
Klyui, A. N. [1 ]
机构
[1] NAS Ukraine, V Lashkaryov Inst Semicond Phys, 41 Prospect Nauky, UA-03028 Kiev, Ukraine
关键词
diamond-like carbon film; ultraviolet irradiation; optical properties;
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Influence of UV irradiation on optical properties of the nitrogen doped diamond-like carbon (DLC) films was studied. Transparency spectra of the initial, UV irradiated and concentrated UV irradiated films were measured. Dependences of the optical bandgap on the nitrogen content were obtained from these spectra Raman measurements revealed a decrease in the graphitic cluster size by two times after UV irradiation. It was shown that concentrated UV irradiation leads to smaller changes in comparison with nonconcentrated UV. Physical mechanism of air oxygen embedding into the DLC structure under UV irradiation is proposed to explain the changes in the properties of the films.
引用
收藏
页码:396 / 399
页数:4
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