ELECTRON-OPTICAL PERFORMANCE OF ELECTRON-BEAM LITHOGRAPHY COLUMNS PREDICTED BY A SIMPLE-MODEL

被引：1
|
作者：
LANGNER, G
STICKEL, W
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 01期
关键词：
D O I：
10.1116/1.584704
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：98 / 103
页数：6
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