DEPOSITION OF TRANSPARENT BORON-NITRIDE THIN-FILM IN A MICROWAVE-DISCHARGE

被引：1
|
作者：
MATSUMOTO, O
INAGAKI, C
UYAMA, H
机构：
来源：
DENKI KAGAKU | 1988年 / 56卷 / 07期
关键词：
D O I：
10.5796/kogyobutsurikagaku.56.478
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：478 / 481
页数：4
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