DEPOSITION OF TRANSPARENT BORON-NITRIDE THIN-FILM IN A MICROWAVE-DISCHARGE

被引：1
|
作者：
MATSUMOTO, O
INAGAKI, C
UYAMA, H
机构：
来源：
DENKI KAGAKU | 1988年 / 56卷 / 07期
关键词：
D O I：
10.5796/kogyobutsurikagaku.56.478
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：478 / 481
页数：4
相关论文
共 50 条
  • [1] DEPOSITION OF BORON-NITRIDE IN A MICROWAVE-DISCHARGE
    MATSUMOTO, O
    SASAKI, M
    SUZUKI, H
    SESHIMO, H
    UYAMA, H
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C481 - C481
  • [2] BORON-NITRIDE THIN-FILM DEPOSITION USING ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMAS
    GORBATKIN, SM
    BURGIE, RF
    OLIVER, WC
    BARBOUR, JC
    MAYER, TM
    THOMAS, ML
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1863 - 1869
  • [3] ORIENTATIONAL RELATIONSHIP BETWEEN CUBIC BORON-NITRIDE AND HEXAGONAL BORON-NITRIDE IN A THIN-FILM SYNTHESIZED BY ION PLATING
    ZHOU, WL
    IKUHARA, YI
    SUZUKI, T
    APPLIED PHYSICS LETTERS, 1995, 67 (24) : 3551 - 3553
  • [4] ELLIPSOMETRIC STUDY OF BORON-NITRIDE THIN-FILM GROWTH ON SI(100)
    REN, SL
    RAO, AM
    EKLUND, PC
    DOLL, GL
    APPLIED PHYSICS LETTERS, 1993, 62 (15) : 1760 - 1762
  • [5] BORON-NITRIDE THIN-FILM DEPOSITION FROM SOLID BORANE AMMONIA USING AN ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SOURCE
    EDDY, CR
    SARTWELL, BD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (04): : 2018 - 2022
  • [6] DEPOSITION AND CHARACTERIZATION OF BORON-NITRIDE THIN-FILMS
    KESTER, DJ
    AILEY, KS
    DAVIS, RF
    DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) : 332 - 336
  • [7] BORON-NITRIDE AND SILICON BORON-NITRIDE FILM AND POLISH CHARACTERIZATION
    NEUREITHER, B
    BASA, C
    SANDWICK, T
    BLUMENSTOCK, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (12) : 3607 - 3611
  • [8] DEPOSITION OF CUBIC BORON-NITRIDE FILMS USING DC ARE DISCHARGE
    LIAO, KJ
    WANG, WL
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1995, 151 (01): : K1 - K3
  • [9] BORON-NITRIDE THIN-FILMS BY MICROWAVE ECR PLASMA CHEMICAL-VAPOR-DEPOSITION
    PAISLEY, MJ
    BOURGET, LP
    DAVIS, RF
    THIN SOLID FILMS, 1993, 235 (1-2) : 30 - 34
  • [10] DIFFUSION EFFECTS AND NUCLEATION OF THIN-FILM BORON-NITRIDE GROWTH FROM BORAZINE ON THE SI(100) SURFACE
    GATES, SM
    CHIANG, CM
    BEACH, DB
    JOURNAL OF APPLIED PHYSICS, 1992, 72 (01) : 246 - 252
12345