METAL LOADED POLY-P-XYLYLENE

被引：4
|
作者：
BIEG, KW
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期
关键词：
D O I：
10.1116/1.570899
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1231 / 1232
页数：2
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