SURFACE-ANALYSIS FOR THE CHARACTERIZATION OF DEFECTS IN THIN-FILM PROCESSES

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作者：

LALEZARI, R

KNOLLENBERG, RG

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SURFACE CHARACTERIZATION AND TESTING II | 1989年 / 1164卷

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TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

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页码：222 / 235

页数：14

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