AN INVESTIGATION OF A NONSPIKING OHMIC CONTACT TO N-GAAS USING THE SI/PD SYSTEM

被引:61
|
作者
WANG, LC
ZHANG, B
FANG, F
MARSHALL, ED
LAU, SS
SANDS, T
机构
[1] BELL COMMUN RES INC,RED BANK,NJ 07701
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
This work is supported by the Defense Advanced Research Project Agency (DARPA); Contract No. MAA-9O3-84-K-OO2 (A. Prabhakar and S. Roosild);
D O I
10.1557/JMR.1988.0922
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
20
引用
收藏
页码:922 / 930
页数:9
相关论文
共 50 条
  • [41] SELECTIVE FORMATION OF OHMIC CONTACTS TO N-GAAS
    YAMANE, Y
    TAKAHASHI, Y
    ISHII, H
    HIRAYAMA, M
    ELECTRONICS LETTERS, 1987, 23 (08) : 382 - 383
  • [42] Novel Cu/Cr/Ge/Pd ohmic contacts on highly doped n-GaAs
    Sahoo, Kartika Chandra
    Chang, Chun-Wei
    Wong, Yuen-Yee
    Hsieh, Tung-Ling
    Chang, Edward Yi
    Lee, Ching-Ting
    JOURNAL OF ELECTRONIC MATERIALS, 2008, 37 (06) : 901 - 904
  • [43] Thermal stability of the non-alloyed Pd/Sn and Pd/Ge ohmic contacts to n-GaAs
    Islam, MS
    McNally, PJ
    Cameron, DC
    THIN SOLID FILMS, 1997, 308 : 607 - 610
  • [44] Au/Ge/Pd ohmic contacts to n-GaAs with the Mo/Ti diffusion barrier
    Chai, CY
    Huang, JA
    Lai, YL
    Wu, JW
    Chang, CY
    Chan, YJ
    Cheng, HC
    JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (12) : 1818 - 1822
  • [45] PD-GE CONTACT TO N-GAAS WITH THE TIW DIFFUSION BARRIER
    HUANG, WC
    LEI, TF
    LEE, CL
    JOURNAL OF ELECTRONIC MATERIALS, 1994, 23 (04) : 397 - 401
  • [46] AN IMPROVED MO/N-GAAS CONTACT BY INTERPOSITION OF A THIN PD LAYER
    NEE, CY
    CHANG, CY
    CHENG, TF
    HUANG, TS
    IEEE ELECTRON DEVICE LETTERS, 1988, 9 (06) : 315 - 316
  • [47] NONSPIKING OHMIC CONTACT TO P-GAAS BY SOLID-PHASE REGROWTH
    HAN, CC
    WANG, XZ
    WANG, LC
    MARSHALL, ED
    LAU, SS
    SCHWARZ, SA
    PALMSTROM, CJ
    HARBISON, JP
    FLOREZ, LT
    POTEMSKI, RM
    TISCHLER, MA
    KUECH, TF
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (11) : 5714 - 5718
  • [48] The importance of the Pd to Sn ratio and of annealing cycles on the performance of Pd/Sn ohmic contacts to n-GaAs
    Islam, MS
    McNally, PJ
    Cameron, DC
    Herbert, PAF
    THIN SOLID FILMS, 1997, 292 (1-2) : 264 - 269
  • [49] Novel Cu/Cr/Ge/Pd Ohmic Contacts on Highly Doped n-GaAs
    Kartika Chandra Sahoo
    Chun-Wei Chang
    Yuen-Yee Wong
    Tung-Ling Hsieh
    Edward Yi Chang
    Ching-Ting Lee
    Journal of Electronic Materials, 2008, 37 : 901 - 904
  • [50] Nonalloyed ohmic contact to n-GaAs with GaS/GaAs quasi-metal-insulator-semiconductor structure
    Okamoto, N
    Takahashi, T
    Tanaka, H
    APPLIED PHYSICS LETTERS, 1998, 73 (06) : 794 - 796