PRODUCTION OF HARD CARBON-FILMS COMBINING PYROLYSIS AND DISCHARGE TECHNIQUES

被引：0
|
作者：
MALAT, V
机构：
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 1981年 / 31卷 / 06期
关键词：
D O I：
10.1007/BF01605317
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：691 / 692
页数：2
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