INTERNAL-STRESS AND THERMAL-EXPANSION COEFFICIENT OF GDA-SI FILMS

被引：17
|
作者：
MIYAGI, M
FUNAKOSHI, N
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 01期
关键词：
D O I：
10.1143/JJAP.20.289
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：289 / 290
页数：2
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