METHODOLOGY FOR BIPOLAR PROCESS DIAGNOSIS AND ITS APPLICATION TO ADVANCED SELF-ALIGNED BIPOLAR-TRANSISTORS

被引:9
|
作者
LI, GP
HACKBARTH, E
CHUANG, CT
TANG, DDL
CHEN, TC
机构
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D O I
10.1109/T-ED.1987.23145
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1736 / 1740
页数:5
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