THERMAL-DECOMPOSITION OF PLASMA-POLYMERIZED ORGANO-SILICON THIN-FILMS

被引：26
|
作者：
WROBEL, AM
KOWALSKI, J
GREBOWICZ, J
KRYSZEWSKI, M
机构：
来源：
JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY | 1982年 / A17卷 / 03期
关键词：
D O I：
10.1080/00222338208056482
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
引用
收藏
页码：433 / 452
页数：20
相关论文
共 50 条
  • [21] SILICON DIOXIDE THIN-FILMS PREPARED BY THERMAL-DECOMPOSITION OF SILICON TETRAACETATE
    MARUYAMA, T
    ABURAI, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (12): : L2268 - L2270
  • [22] ELECTRICAL-PROPERTIES OF SEMICONDUCTIVE PLASMA-POLYMERIZED THIN-FILMS
    SUZUKI, S
    TASAKA, S
    MIYATA, S
    KOBUNSHI RONBUNSHU, 1984, 41 (09) : 493 - 499
  • [23] Deposition of thin-films on EPDM substrate with a plasma-polymerized coating
    Alba-Elias, Fernando
    Ordieres-Mere, Joaquin
    Gonzalez-Marcos, Ana
    SURFACE & COATINGS TECHNOLOGY, 2011, 206 (2-3): : 234 - 242
  • [24] PLASMA-POLYMERIZED THIN-FILMS OF ORGANOSILICON DERIVATIVES AND THEIR HYDROPHOBIC PROPERTIES
    FUJISHIMA, M
    FUNAKOSHI, C
    YOSHIDA, Y
    YAMASHITA, T
    KASHIWAGI, K
    ISHIHARA, K
    KOBUNSHI RONBUNSHU, 1995, 52 (06) : 373 - 377
  • [25] DC CONDUCTION STUDY ON THIN-FILMS OF PLASMA-POLYMERIZED ACRYLONITRILE
    BHUIYAN, AH
    BHORASKAR, SV
    INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1989, 27 (12) : 819 - 821
  • [26] PLASMA-POLYMERIZED THIN-FILMS CONTAINING ANION AND CATION GROUPS
    INAGAKI, N
    OHISHI, K
    REACTIVE POLYMERS, 1985, 4 (01): : 21 - 25
  • [27] SELECTIVE GAS SORPTION OF PLASMA-POLYMERIZED ORGANOSILOXANE THIN-FILMS
    JANCA, J
    SODOMKA, L
    THIN SOLID FILMS, 1992, 216 (02) : 235 - 238
  • [28] THERMAL-DECOMPOSITION OF TERNARY CHALCOPYRITE THIN-FILMS
    RUCKH, M
    KESSLER, J
    OBERACKER, TA
    SCHOCK, HW
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 : 65 - 67
  • [29] THERMAL-DECOMPOSITION OF TITANIUM DEUTERIDE THIN-FILMS
    MALINOWSKI, ME
    JOURNAL OF THE LESS-COMMON METALS, 1983, 89 (01): : 27 - 35
  • [30] THERMAL-DECOMPOSITION OF NICKEL CARBIDE THIN-FILMS
    SINHAROY, S
    SMITH, MA
    LEVENSON, LL
    SURFACE SCIENCE, 1978, 72 (04) : 710 - 718
12345