ALIGNMENT MEASUREMENT WITH STRAIGHTNESS INTERFEROMETER

被引：0
|
作者：
DUTSCHKE, W
GROSSMANN, B
机构：
来源：
WERKSTATTSTECHNIK ZEITSCHRIFT FUR INDUSTRIELLE FERTIGUNG | 1978年 / 68卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
引用
收藏
页码：209 / 212
页数：4
相关论文
共 50 条
  • [21] A Wollaston Prism and Corner Cube Reflector Cooperative Sensing Heterodyne Interferometer for Simultaneous Measurement of Straightness Errors and Displacement
    Yan, Liping
    Chen, Yu
    Lou, Yingtian
    Xie, Jiandong
    Chen, Benyong
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2024, 73
  • [22] Straightness measurement of a linear stage
    Tenjimbayashi, K
    Furukawa, H
    OPTICS FOR THE QUALITY OF LIFE, PTS 1 AND 2, 2003, 4829 : 1052 - 1053
  • [23] Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters
    Chen, Benyong
    Xu, Bin
    Yan, Liping
    Zhang, Enzheng
    Liu, Yanna
    OPTICS EXPRESS, 2015, 23 (07): : 9052 - 9073
  • [24] Simultaneous measurement of the straightness error and its position using a modified Wollaston-prism-sensing homodyne interferometer
    Chen, Benyong
    Mao, Weidong
    Lou, Yingtian
    Yan, Liping
    Li, Zhaoyang
    Yang, Ye
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2020, 31 (08)
  • [25] MICHELSON INTERFEROMETER ALIGNMENT
    MOORE, FL
    AMERICAN JOURNAL OF PHYSICS, 1971, 39 (11) : 1395 - &
  • [26] A generalized, periodic nonlinearity-reduced interferometer for straightness measurements
    Wu, Chien-ming
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (06):
  • [27] MEASUREMENT OF STRAIGHTNESS AND VERTICALITY OF SHEET PILING
    Kokoszka, Wanda
    Ochab, Piotr
    Gardzinska, Anna
    CIVIL AND ENVIRONMENTAL ENGINEERING REPORTS, 2020, 30 (03) : 281 - 294
  • [28] NONCONTACTING STRAIGHTNESS MEASUREMENT TO NANOMETER ACCURACY
    VIRDEE, MS
    INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 1995, 35 (02): : 157 - 164
  • [29] STRAIGHTNESS MEASUREMENT OF LARGE MACHINE GUIDEWAYS
    Ptaszynski, W.
    Gessner, A.
    Frackowiak, P.
    Stanick, R.
    METALURGIJA, 2011, 50 (04): : 281 - 284
  • [30] Laser homodyne straightness interferometer with simultaneous measurement of six degrees of freedom motion errors for precision linear stage metrology
    Lou, Yingtian
    Yan, Liping
    Chen, Benyong
    Zhang, Shihua
    OPTICS EXPRESS, 2017, 25 (06): : 6805 - 6821
12345