In-Situ XPS Measurement of Co Nanoparticles Fabricated by Gas Evaporation Method

The cobalt and cobalt nitride nanoparticles (NPs) have been fabricated by gas evaporation method under helium or nitrogen gases environment. These chemical states and compositions have been investigated by in-situ XPS and those distributions have been estimated by AFM. It is found that both cobalt and cobalt nitride NPs are slightly oxidized by the residual gas in the chamber. The cobalt nitride NPs fabricated under nitrogen gas are including the nitrogen atoms at 4.7% and the nitrogen atoms have the chemical bonding with the cobalt atoms.