DISLOCATION MODEL OF ANOMALOUS DIFFUSION OF BORON AND PHOSPHORUS IN SILICON

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作者
PASHKOV, VI
PAVLOV, PV
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SOVIET PHYSICS SOLID STATE,USSR | 1971年 / 13卷 / 04期
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中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
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页码:867 / +
页数:1
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