共 50 条
- [1] ANOMALOUS DIFFUSION OF BORON AND PHOSPHORUS IN SILICON PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1972, 11 (01): : K27 - &
- [2] ANOMALOUS DIFFUSION OF BORON, PHOSPHORUS AND ARSENIC IN SILICON ACTA CIENTIFICA VENEZOLANA, 1977, 28 : 32 - 32
- [6] A comparison of boron and phosphorus diffusion and dislocation loop growth from silicon implants into silicon ION IMPLANTATION TECHNOLOGY - 96, 1997, : 630 - 633
- [9] ANOMALOUS DIFFUSION IN PHOSPHORUS IMPLANTED SILICON RADIATION EFFECTS LETTERS, 1982, 68 (02): : 39 - 44
- [10] Anomalous diffusion of implanted boron in preamorphized silicon Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 1990, 11 (07): : 539 - 545