SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS

被引：75
|
作者：
BEHRISCH, R [1 ]
MADERLECHNER, G [1 ]
SCHERZER, BMU [1 ]
ROBINSON, MT [1 ]
机构：
[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830
来源：
APPLIED PHYSICS | 1979年 / 18卷 / 04期
关键词：
D O I：
10.1007/BF00899693
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：391 / 398
页数：8
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