CHARACTERIZATION OF A RAPID THERMAL ANNEAL TINXOY/TISI2 CONTACT BARRIER

被引：6
|
作者：
HO, VQ
机构：
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1989年 / 18卷 / 04期
关键词：
D O I：
10.1007/BF02657778
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：493 / 499
页数：7
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