THICKNESS MONITORING FOR EPITAXIAL AND INSULATING FILMS WITH UNSHARP FILM-SUBSTRATE BOUNDARIES

被引：0
|
作者：
BILENKO, DI
BERMAN, LV
DVORKIN, BA
ILIN, MA
KAZANOVA, NP
POLYANSKAYA, VP
SOLOVEVA, EV
机构：
来源：
SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR | 1980年 / 16卷 / 09期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：641 / 646
页数：6
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