CREEP OF THIN METALLIC-FILMS

被引：14
|
作者：
BROTZEN, FR [1 ]
ROSENMAYER, CT [1 ]
COFER, CG [1 ]
GALE, RJ [1 ]
机构：
[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265
来源：
VACUUM | 1990年 / 41卷 / 4-6期
关键词：
D O I：
10.1016/0042-207X(90)93935-C
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Free-standing films of Al, AlSi (1%) and Cu, 1 μm thick, were prepared by chemical ablation from commercially produced metallizations deposited on Si/SiO2 substrates. The films were tested at various temperatures and stresses in a specially designed creep apparatus. By varying temperatures and loads, the activation energies and stress dependences for secondary creep were determined. In addition, primary creep curves were generated by adding small load increments during the tests. By evaluating these curves, the activation volumes and dislocation densities were obtained. © 1990.
引用
收藏
页码：1287 / 1290
页数：4
相关论文
共 50 条
  • [1] CONDUCTIVITY OF THIN METALLIC-FILMS
    KIERUL, J
    LEDZION, J
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 119 (02): : K117 - K120
  • [2] VOIDS IN THIN METALLIC-FILMS
    ZITO, R
    THIN SOLID FILMS, 1978, 54 (03) : L13 - L15
  • [3] INTERFACIAL STRESSES IN THIN METALLIC-FILMS
    CHEFI, C
    HILA, F
    ELHILI, A
    GILLET, M
    SURFACE SCIENCE, 1985, 162 (1-3) : 585 - 590
  • [4] TEXTURE DEVELOPMENT IN THIN METALLIC-FILMS
    KNORR, DB
    TRACY, DP
    LU, TM
    TEXTURES AND MICROSTRUCTURES, 1991, 14 : 543 - 554
  • [5] THIN METALLIC-FILMS FOR CORROSION CONTROL
    NOWAK, WB
    SURFACE & COATINGS TECHNOLOGY, 1991, 49 (1-3): : 71 - 77
  • [6] MICROMAGNETIC STUDIES OF THIN METALLIC-FILMS
    ZHU, JG
    BERTRAM, HN
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (08) : 3248 - 3253
  • [7] CYCLOTRON WAVES IN THIN METALLIC-FILMS
    ZELENIN, SP
    KONDRATJEV, AS
    KUCHMA, AE
    VESTNIK LENINGRADSKOGO UNIVERSITETA SERIYA FIZIKA KHIMIYA, 1980, (04): : 19 - 25
  • [8] MECHANICAL TESTING OF THIN METALLIC-FILMS
    GRIFFIN, AJ
    BROTZEN, FR
    DUNN, CF
    THIN SOLID FILMS, 1992, 220 (1-2) : 265 - 270
  • [9] IONIC SOUND IN THIN METALLIC-FILMS
    KONDRATEV, AS
    KUCHMA, AE
    MEILANOV, RP
    FIZIKA METALLOV I METALLOVEDENIE, 1976, 41 (04): : 742 - 747
  • [10] THERMAL STRAINS IN THIN METALLIC-FILMS
    PICHARD, CR
    TELLIER, CR
    TOSSER, AJ
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (07) : 1325 - 1329
12345