EPITAXIAL LAYER THICKNESS MEASUREMENT BY FAR-INFRAED ELLIPSOMETRY

被引：0
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作者：
DENICOLA, RO
SAIFI, MA
机构：
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1971年 / 61卷 / 11期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
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页码：1583 / &
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