LASER CLEANING OF GAAS-SURFACES INVACUO

被引：10
|
作者：
RODWAY, DC [1 ]
CULLIS, AG [1 ]
WEBBER, HC [1 ]
机构：
[1] ROYAL SIGNALS & RADAR ESTAB,GREAT MALVERN WR14 3PS,WORCESTERSHIRE,ENGLAND
来源：
APPLIED SURFACE SCIENCE | 1980年 / 6卷 / 01期
关键词：
D O I：
10.1016/0378-5963(80)90058-6
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：76 / 81
页数：6
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