ELECTROPHYSICAL CHARACTERISTICS OF SILICON-CARBIDE FILMS ON SILICON

被引：0
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作者：
VLASKINA, SI
KRASIKOVA, AV
SIDYAKIN, VG
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来源：
INORGANIC MATERIALS | 1989年 / 25卷 / 09期
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T [工业技术];
学科分类号：
08 ;
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页码：1326 / 1328
页数：3
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