PHYSICAL-PROPERTIES OF AMORPHOUS-SILICON, PREPARED BY HF SILANE DECOMPOSITION AT HIGH SUBSTRATE-TEMPERATURE

被引：1
|
作者：
KONKOV, OI
TERUKOV, EI
KYDOYAROVA, VK
BABAYEV, AA
机构：
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1987年 / 97-8卷
关键词：
D O I：
10.1016/0022-3093(87)90333-4
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1391 / 1394
页数：4
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