THE HYDROGEN CONCENTRATION OF DIAMOND-LIKE AMORPHOUS-CARBON FILMS BY ELASTIC RECOIL DETECTION ANALYSIS

被引：8
|
作者：
LONG, XG
PENG, XF
HE, FQ
LIU, MT
LIN, XG
机构：
[1] Institute of Nuclear Science and Technology, Sichuan University, Chengdu
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 68卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(92)96090-L
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
By using elastic recoil detection analysis, the hydrogen concentration of amorphous carbon films prepared by ion beam deposition was determined. The dependence of the hydrogen concentration on the deposition parameters (energy of ion beam, beam current density, and ratio of hydrogen to methane in gas mixture) was observed for these films. It seems clear that the diamond cubic structure in a-C:H films increases monotonically with decreasing hydrogen concentration.
引用
收藏
页码：266 / 268
页数：3
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