AG(+) IMPLANTATION IN AL2O3,LINBO3 AND QUARTZ

被引：10
|
作者：
RAHMANI, M
TOWNSEND, PD
机构：
来源：
VACUUM | 1989年 / 39卷 / 11-12期
关键词：
D O I：
10.1016/0042-207X(89)91112-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1157 / 1162
页数：6
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