PRESSURE TRANSMITTER EMPLOYING A DIFFUSED SILICON SENSOR

被引:1
|
作者
KOTNIK, JT
HAMILTON, JH
机构
关键词
D O I
10.1109/TIECI.1970.229606
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:285 / &
相关论文
共 50 条
  • [41] New silicon die design for pressure sensor
    不详
    CHEMICAL ENGINEERING & TECHNOLOGY, 2000, 23 (02) : 99 - 99
  • [42] Modelling and experiment of a silicon resonant pressure sensor
    Cui, Z
    Chen, DY
    Xia, SH
    ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2002, 32 (01) : 29 - 35
  • [43] INTEGRATED OPTIC PRESSURE SENSOR ON SILICON SUBSTRATE
    OHKAWA, M
    IZUTSU, M
    SUETA, T
    APPLIED OPTICS, 1989, 28 (23): : 5153 - 5157
  • [44] Design and modelling of a silicon resonant pressure sensor
    Cui, Z
    Chen, DY
    Xia, SH
    DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001, 2001, 4408 : 187 - 193
  • [45] A silicon carbide pressure sensor for harsh environment
    Shams, QA
    Kahng, S
    Mitchell, M
    Kuhn, T
    SPACE TECHNOLOGY AND APPLICATIONS INTERNATIONAL FORUM-STAIF 2002, 2002, 608 : 353 - 356
  • [46] Modelling and Experiment of a Silicon Resonant Pressure Sensor
    Zheng Cui
    Deyong Chen
    Shanhong Xia
    Analog Integrated Circuits and Signal Processing, 2002, 32 : 29 - 35
  • [47] Design for Silicon Piezoresistive Pressure Sensor Chips
    He, Feng
    Feng, Yingqi
    Dai, Junjie
    Li, Junhui
    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2023, 13 (07): : 920 - 927
  • [48] Temperature compensation of silicon resonant pressure sensor
    Veris, J
    SENSORS AND ACTUATORS A-PHYSICAL, 1996, 57 (03) : 179 - 182
  • [49] HARMONIC RESPONSE OF SILICON CAPACITIVE PRESSURE SENSOR
    PONS, P
    BLASQUEZ, G
    RATIER, N
    SENSORS AND ACTUATORS A-PHYSICAL, 1991, 26 (1-3) : 301 - 305
  • [50] SILICON PRESSURE SENSOR BASED ON A RESONATING ELEMENT
    BUSER, RA
    DEROOIJ, NF
    SCHULTHEIS, L
    SENSORS AND ACTUATORS A-PHYSICAL, 1991, 27 (1-3) : 717 - 722