DETERMINATION OF IMPLANTATION PROFILES IN SOLIDS BY SECONDARY ION MASS-SPECTROMETRY

被引：18
|
作者：
MAUL, J
WITTMAACK, K
SCHULZ, F
机构：
来源：
PHYSICS LETTERS A | 1972年 / A 41卷 / 02期
关键词：
D O I：
10.1016/0375-9601(72)91101-2
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：177 / +
页数：1
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