VHF-GD A-SI-H FILMS PREPARED AT VERY LOW-TEMPERATURE

被引：4
|
作者：
ZIEGLER, Y
CURTINS, H
BAUMANN, J
SHAH, A
机构：
来源：
AMORPHOUS SILICON TECHNOLOGY - 1989 | 1989年 / 149卷
关键词：
D O I：
10.1557/PROC-149-81
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：81 / 86
页数：6
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