LASER CHEMICAL VAPOR-DEPOSITION OF METALS AND INSULATORS

被引：33

|

作者：

ALLEN, SD

BASS, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期

关键词：

D O I：

10.1116/1.569967

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：431 / 431

页数：1

相关论文

共 50 条

[1] LASER CHEMICAL VAPOR-DEPOSITION OF METALS AND INSULATORS
ALLEN, SD
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1979, 15 (09) : D43 - D44
[2] LASER STIMULATED CHEMICAL VAPOR-DEPOSITION OF METALS ON POLYIMIDES
BEZUK, SJ
KRYZAK, C
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (08) : C355 - C355
[3] LASER CHEMICAL VAPOR-DEPOSITION
ROY, SK
BULLETIN OF MATERIALS SCIENCE, 1988, 11 (2-3) : 129 - 135
[4] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF METALS FOR MICROELECTRONICS TECHNOLOGY
BAUM, TH
COMITA, PB
THIN SOLID FILMS, 1992, 218 (1-2) : 80 - 94
[5] INFRARED-LASER INDUCED CHEMICAL VAPOR-DEPOSITION (LACVD) OF METALS
BLACK, JG
THOMAS, HR
DUKE, CB
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (03): : 454 - 454
[6] APPLICATIONS FOR LASER CHEMICAL VAPOR-DEPOSITION
ALLEN, SD
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1979, 69 (10) : 1461 - 1461
[7] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD
BAUM, TH
JONES, CR
APPLIED PHYSICS LETTERS, 1985, 47 (05) : 538 - 540
[8] LASER CHEMICAL VAPOR-DEPOSITION OF COPPER
HOULE, FA
JONES, CR
BAUM, T
PICO, C
KOVAC, CA
APPLIED PHYSICS LETTERS, 1985, 46 (02) : 204 - 206
[9] ADVANCES IN SEMICONDUCTOR HETEROEPITAXY ON INSULATORS THROUGH CHEMICAL VAPOR-DEPOSITION
MANASEVIT, HM
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : C82 - C82
[10] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY METALS
BAUM, TH
LARSON, CE
HIGH TEMPERATURE SCIENCE, 1989, 27 : 237 - 249

← 1 2 3 4 5 →