AN INTEGRATED MMIC CAD SYSTEM

被引：0
|
作者：
YAMADA, T
NISHIDA, M
SAWAI, T
HARADA, Y
机构：
来源：
IEICE TRANSACTIONS ON ELECTRONICS | 1992年 / E75C卷 / 06期
关键词：
MICROWAVE; SIMULATION; CAD; SYSTEM;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An integrated CAD/CAM system for MMIC development has been firstly realized, which consists of electron beam direct drawing, microwave circuit simulator, pattern generator and RF & DC on-wafer automatic measurement subsystems, connected through an Ethernet LAN. The system can develop not only new MMICs and their element devices, but also their accurate simulation models quickly and efficiently. Preliminary successful applications of this system have been demonstrated by DC-HFET with a 0.25-mu-m T-shaped gate electrode and MMIC low-noise amplifiers operating at X- and L-bands.
引用
收藏
页码：656 / 662
页数：7
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