AMORPHOUS FILM GROWTH OF ELECTROLESS OSMIUM DEPOSITION ON SILICON SINGLE-CRYSTAL STUDIED BY AN ANALYTICAL SCANNING-TRANSMISSION ELECTRON-MICROSCOPE

被引：3
|
作者：
CHANG, YS
CHOU, ML
机构：
来源：
MATERIALS CHEMISTRY AND PHYSICS | 1989年 / 24卷 / 1-2期
关键词：
D O I：
10.1016/0254-0584(89)90052-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：131 / 145
页数：15
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