FOCUSED ION-BEAM REPAIR - STAINING OF PHOTOMASKS AND RETICLES

被引：3
|
作者：
PREWETT, PD
SUNDARAM, GM
机构：
[1] SERC Rutherford-Appleton Lab, Didcot
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1993年 / 26卷 / 07期
关键词：
D O I：
10.1088/0022-3727/26/7/021
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Focused ion beam (FIB) repair of chromium defects on photomasks and reticles leaves a post repair stain in the quartz substrate. The wavelength dependent absorption properties of typical stained regions have been measured, showing transition losses up to 80% in the deep uv. A simple model is in good qualitative agreement with the experimental results.
引用
收藏
页码：1135 / 1137
页数：3
相关论文
共 50 条
  • [1] FOCUSED ION-BEAM REPAIR OF LITHOGRAPHIC MASKS
    WAGNER, A
    LEVIN, JP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 224 - 230
  • [2] REPAIR OF PHOTOMASKS WITH FOCUSED ION-BEAMS
    WARD, BW
    SHAVER, DC
    WARD, ML
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 537 : 110 - 116
  • [3] FOCUSED ION-BEAM INDUCED DEPOSITION OF PLATINUM FOR REPAIR PROCESSES
    TAO, T
    WILKINSON, W
    MELNGAILIS, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (01): : 162 - 164
  • [4] Focused ion-beam tomography
    Kubis, AJ
    Shiflet, GJ
    Dunn, DN
    Hull, R
    METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2004, 35A (07): : 1935 - 1943
  • [5] FOCUSED ION-BEAM TECHNOLOGY
    GAMO, K
    VACUUM, 1991, 42 (1-2) : 89 - 93
  • [6] FOCUSED ION-BEAM TECHNOLOGY
    OCHIAI, Y
    MATSUI, S
    MORI, K
    SOLID STATE TECHNOLOGY, 1987, 30 (11) : 75 - 79
  • [7] FOCUSED ION-BEAM LITHOGRAPHY
    GAMO, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 65 (1-4): : 40 - 49
  • [8] FOCUSED ION-BEAM TECHNOLOGY
    GAMO, K
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (06) : 1118 - 1123
  • [9] FOCUSED ION-BEAM IMPLANTATION
    REUSS, RH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (03) : C122 - C122
  • [10] FOCUSED ION-BEAM LITHOGRAPHY
    MELNGAILIS, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1271 - 1280
12345