RESONANT SILICON STRUCTURES

被引：38
|
作者：
BUSER, RA
DEROOIJ, NF
机构：
来源：
SENSORS AND ACTUATORS | 1989年 / 17卷 / 1-2期
关键词：
D O I：
10.1016/0250-6874(89)80074-5
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：145 / 154
页数：10
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