ION-BEAM OXIDATION

被引：30

作者：

HARPER, JME

HEIBLUM, M

SPEIDELL, JL

CUOMO, JJ

机构：

来源：

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.329220

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4118 / 4121

页数：4

共 50 条

[21] ION-BEAM LITHOGRAPHY
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[22] ION-BEAM SUPERPINCH
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[23] ION-BEAM MICROFABRICATION
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[26] ION-BEAM LITHOGRAPHY
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[30] ION-BEAM ETCHING
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