CONTACT RESISTIVITY OF SOME MAGNESIUM SILICON AND MAGNESIUM SILICIDE SILICON STRUCTURES

被引：35
|
作者：
JANEGA, PL
MCCAFFREY, J
LANDHEER, D
BUCHANAN, M
DENHOFF, M
MITCHEL, D
机构：
来源：
APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 21期
关键词：
D O I：
10.1063/1.100496
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2056 / 2058
页数：3
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