EMISSION-SPECTROSCOPY OF SIH IN A SILANE GLOW-DISCHARGE

被引：65

|

作者：

PERRIN, J

DELAFOSSE, E

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1980年 / 13卷 / 05期

关键词：

D O I：

10.1088/0022-3727/13/5/009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：759 / 765

页数：7

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