PROTON NMR-STUDIES OF ANNEALED PLASMA-DEPOSITED AMORPHOUS SI-H FILMS

被引：72
|
作者：
REIMER, JA [1 ]
VAUGHAN, RW [1 ]
KNIGHTS, JC [1 ]
机构：
[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
来源：
SOLID STATE COMMUNICATIONS | 1981年 / 37卷 / 02期
关键词：
D O I：
10.1016/0038-1098(81)90734-1
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：161 / 164
页数：4
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