NATURE OF VICINAL LASER-ANNEALED SI(111) SURFACES

被引：32
|
作者：
CHABAL, YJ
ROWE, JE
CHRISTMAN, SB
机构：
来源：
PHYSICAL REVIEW B | 1981年 / 24卷 / 06期
关键词：
D O I：
10.1103/PhysRevB.24.3303
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：3303 / 3309
页数：7
相关论文
共 50 条
  • [31] ELECTRICAL CHARACTERISTICS OF LASER-ANNEALED SILICON DIODES
    MARTINEZ, J
    FOGARASSY, E
    MESLI, A
    SIFFERT, P
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 42 (04): : 273 - 277
  • [32] Optical properties of ion-implanted laser-annealed Si studied by spectroscopic ellipsometry
    Asai, K
    Watanabe, K
    Sameshima, T
    Saitoh, T
    Xiong, YM
    INTERNATIONAL SYMPOSIUM ON POLARIZATION ANALYSIS AND APPLICATIONS TO DEVICE TECHNOLOGY, 1996, 2873 : 258 - 261
  • [33] ELECTRICAL CHARACTERISTICS OF LASER-ANNEALED SILICON DIODES
    BENTON, JL
    CELLER, GK
    KIMMERLING, LC
    MILLER, GL
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C138 - C138
  • [34] SEGREGATION AND INCREASED DOPANT SOLUBILITY IN PT-IMPLANTED AND LASER-ANNEALED SI LAYERS
    CULLIS, AG
    WEBBER, HC
    POATE, JM
    SIMONS, AL
    APPLIED PHYSICS LETTERS, 1980, 36 (04) : 320 - 322
  • [35] Steps and Ge epitaxy on vicinal Si (111) surfaces: An STM study
    Balzarotti, A.
    Fanfoni, M.
    Persichetti, L.
    Sgarlata, A.
    SURFACE SCIENCE, 2020, 696
  • [36] DEFECT LUMINESCENCE IN CW LASER-ANNEALED SILICON
    STREET, RA
    JOHNSON, NM
    GIBBONS, JF
    JOURNAL OF APPLIED PHYSICS, 1979, 50 (12) : 8201 - 8203
  • [37] SCANNING TUNNELING MICROSCOPY ON LASER-ANNEALED AND THERMAL-ANNEALED SI(111) - TRANSITIONS FROM 7X7 RECONSTRUCTED TO DISORDERED SURFACE-STRUCTURES
    WIESENDANGER, R
    TARRACH, G
    SCANDELLA, L
    GUNTHERODT, HJ
    ULTRAMICROSCOPY, 1990, 32 (03) : 291 - 295
  • [38] Effect of Ag adsorption on the structure and morphology of vicinal Si(111) surfaces
    Dolbak, AE
    Olshanetsky, BZ
    Zhachuk, RA
    PHYSICS OF LOW-DIMENSIONAL STRUCTURES, 1999, 7-8 : 163 - 173
  • [39] Orientation and structure of triple step staircase on vicinal Si(111) surfaces
    Teys, S. A.
    Romanyuk, K. N.
    Zhachuk, R. A.
    Olshanetsky, B. Z.
    SURFACE SCIENCE, 2006, 600 (21) : 4878 - 4882
  • [40] STUDY OF SI(111) VICINAL SURFACES - FACETING AFTER PD DEPOSITION
    OUSTRY, A
    CAUMONT, M
    BERTY, J
    DAVID, MJ
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1986, 11 (06): : 407 - 419
12345