STRUCTURAL-PROPERTIES OF SILICON THIN-FILMS DEPOSITED BY GLOW-DISCHARGE

被引：6
|
作者：
MESSANA, C
DEANGELIS, BA
CONTE, G
GRAMACCIONI, C
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1981年 / 14卷 / 06期
关键词：
D O I：
10.1088/0022-3727/14/6/002
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L91 / L94
页数：4
相关论文
共 50 条
  • [31] LUMINESCENCE DECAY IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON
    TSANG, C
    STREET, RA
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1978, 37 (05): : 601 - 608
  • [32] SUPERCONDUCTING AND STRUCTURAL-PROPERTIES OF YBACUO THIN-FILMS DEPOSITED BY INVERTED CYLINDRICAL MAGNETRON SPUTTERING
    XI, XX
    LINKER, G
    MEYER, O
    NOLD, E
    OBST, B
    RATZEL, F
    SMITHEY, R
    STREHLAU, B
    WESCHENFELDER, F
    GEERK, J
    ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1989, 74 (01): : 13 - 19
  • [33] STRUCTURAL-PROPERTIES OF THIN POLYCRYSTALLINE SILICON FILMS
    LESNIKOVA, VP
    DOKLADY AKADEMII NAUK BELARUSI, 1978, 22 (04): : 336 - 339
  • [34] ODMR IN GLOW-DISCHARGE DEPOSITED SILICON-NITRIDE
    LOWE, AJ
    CAVENETT, BC
    HOMEWOOD, KP
    POWELL, MJ
    ELLIOTT, SR
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 735 - 738
  • [35] REACTION-KINETICS IN POLYMERIZATION OF THIN-FILMS ON ELECTRODES OF A GLOW-DISCHARGE GAP
    POLL, HU
    ARZT, M
    WICKLEDER, KH
    EUROPEAN POLYMER JOURNAL, 1976, 12 (08) : 505 - 512
  • [36] PREPARATION OF THIN SILICA FILMS IN A GLOW-DISCHARGE
    GILMAN, AB
    KOLOTYRKIN, VM
    HIGH ENERGY CHEMISTRY, 1976, 10 (05) : 410 - 411
  • [37] INFRARED VIBRATIONAL-SPECTRA OF HYDROGENATED AMORPHOUS-SILICON CARBIDE THIN-FILMS PREPARED BY GLOW-DISCHARGE
    RAY, S
    DAS, D
    BARUA, AK
    SOLAR ENERGY MATERIALS, 1987, 15 (01): : 45 - 57
  • [38] THE EFFECTS OF THE GLASS SUBSTRATE ON THE PROPERTIES OF RF GLOW-DISCHARGE AMORPHOUS SI-H THIN-FILMS
    KOO, YC
    PERRIN, R
    AUST, KT
    ZUKOTYNSKI, S
    KRUZELECKY, RV
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (07) : 2443 - 2445
  • [39] MICROSTRUCTURE AND SUPERCONDUCTING PROPERTIES OF THIN-FILMS OF YBCO ON (100) MGO SUBSTRATE GROWN BY GLOW-DISCHARGE DEPOSITION
    KUPPUSAMI, P
    RAGHUNATHAN, VS
    VEDHESWAR, AG
    HARIHARAN, Y
    PHYSICA C, 1993, 215 (1-2): : 213 - 225
  • [40] ELLIPSOMETRIC STUDY OF A-SI-H THIN-FILMS DEPOSITED BY SQUARE-WAVE MODULATED RF GLOW-DISCHARGE
    LLORET, A
    BERTRAN, E
    ANDUJAR, JL
    CANILLAS, A
    MORENZA, JL
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) : 632 - 638
12345