THERMAL-STABILITY OF SI/SI1-XGEX/SI HETEROJUNCTION BIPOLAR-TRANSISTOR STRUCTURES GROWN BY LIMITED REACTION PROCESSING

被引:27
|
作者
NOBLE, DB [1 ]
HOYT, JL [1 ]
GIBBONS, JF [1 ]
SCOTT, MP [1 ]
LADERMAN, SS [1 ]
ROSNER, SJ [1 ]
KAMINS, TI [1 ]
机构
[1] HEWLETT PACKARD CO,PALO ALTO,CA 94304
关键词
D O I
10.1063/1.102138
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1978 / 1980
页数:3
相关论文
共 50 条
  • [31] Mechanisms of diffusion-enhanced thermal stability of Si/Si1-xGex/Si heterostructures grown by chemical vapor deposition
    Bentzen, A
    Menon, C
    Radamson, HH
    JOURNAL OF CRYSTAL GROWTH, 2004, 261 (01) : 22 - 29
  • [32] THERMAL-STABILITY OF SI/SI1-XGEX/SI HETEROSTRUCTURES DEPOSITED BY VERY LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION
    JANG, SM
    KIM, HW
    REIF, R
    APPLIED PHYSICS LETTERS, 1992, 61 (03) : 315 - 317
  • [33] Misfit dislocation structures at MBE-grown Si1-xGex/Si interfaces
    Fukuda, Yukio
    Kohama, Yoshitaka
    Seki, Masahiro
    Ohmachi, Yoshiro
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1988, 27 (09): : 1593 - 1598
  • [34] EFFECT OF THERMAL ANNEALING ON THE RAMAN-SPECTRUM OF SI1-XGEX GROWN ON SI
    NAKANO, N
    MARVILLE, L
    JANG, SM
    LIAO, K
    TSAI, C
    TSAI, J
    KIM, HW
    REIF, R
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (01) : 414 - 417
  • [36] COMPARATIVE-ANALYSIS OF THE HIGH-FREQUENCY PERFORMANCE OF SI/SI1-XGEX HETEROJUNCTION BIPOLAR AND SI BIPOLAR-TRANSISTORS
    CHEN, J
    GAO, GB
    MORKOC, H
    SOLID-STATE ELECTRONICS, 1992, 35 (08) : 1037 - 1044
  • [37] Secondary ion mass spectroscopy ultrashallow depth profiling for Si/Si1-xGex/Si heterojunction bipolar transistors
    Kruger, D
    Kurps, R
    Heinemann, B
    Herzel, F
    Zeindl, HP
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (01): : 287 - 293
  • [38] Effect of transistor geometry on the electrical characteristics of Si1-xGex heterojunction bipolar transistors at low temperatures
    Hashim, MDR
    Lever, RF
    Ashburn, P
    Parker, GJ
    JOURNAL DE PHYSIQUE IV, 1996, 6 (C3): : 119 - 124
  • [39] A base-emitter self-aligned multi-finger Si1-xGex/Si power heterojunction bipolar transistor
    Xue Chun-Lai
    Yao Fei
    Shi Wen-Hua
    Cheng Bu-Wen
    Wang Hong-Jie
    Yu Jin-Zhong
    Wang Qi-Ming
    CHINESE PHYSICS LETTERS, 2007, 24 (07) : 2125 - 2127
  • [40] RELAXATION OF SI/SI1-XGEX STRAINED LAYER STRUCTURES
    GIBBINGS, CJ
    TUPPEN, CG
    HALLIWELL, MAG
    HOCKLY, M
    DAVEY, ST
    LYONS, MH
    HETEROSTRUCTURES ON SILICON : ONE STEP FURTHER WITH SILICON, 1989, 160 : 121 - 128