DYNAMIC WETTING BEHAVIOR OF SILICON-WAFERS IN ALKALINE-SOLUTIONS OF INTEREST TO SEMICONDUCTOR PROCESSING

被引：0
|
作者：
PARK, JG [1 ]
RAGHAVAN, S [1 ]
机构：
[1] UNIV ARIZONA,ARIZONA MAT LABS,DEPT MAT SCI & ENGN,TUCSON,AZ 85721
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1992年 / 203卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：131 / COLL
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