PROCEDURE FOR DETERMINATION OF PARAMETERS OF A CONDESING STRUCTURES WITH A MOVABLE CAPACITOR PLATES

Procedure for definition of parameters of a condenser structure cap is considered. The procedure allows by means of one operation - volt - capacitance characteristic measuring - to define the whole complex of the major parameters of a cap - size of a working air gap, a membrane deflection, surface electret potential and a membrane tension. The expressions for capacitance of a condenser structure cap as a function of specified parameters are obtained. Analytical expression for capacitance of a cap depending on the specified parameters and measuring of its voltcapacitance characteristic allow to define these parameters by solving corresponding system of equations. The procedure considered in the present work is a not-destroying quality monitoring method.